The principle of mass flow meters
When the gas passes through the mass flow controller (mass flow meter), most of the gas passes through the diverter and a small amount of gas flows through the flow sensor.
The flow control range of a mass flow controller is usually 2% to 100% of full scale.
The flow sensor uses the principle of capillary heat transfer calorimetry, and the bridge converts the detected flow signals into electrical signals. The signal amplified by the amplifier is 0~5VDC, flow detection the amplified voltage is compared with the set voltage, then the voltage difference comparison after amplified to drive the control valve, PID closed-loop control, the flow through the channel flow and the flow of set equal.
The mass flow controller consists of flow sensor, diverter channel, flow control valve and amplifying control circuit. The mass flowmeter is composed of flow sensor, shunt channel, amplifying circuit and so on.
