The working principle of the oil pressure sensor
A sensor made of monocrystalline silicon material using piezoresistive effect and integrated circuit technology. In silicon material force, resistivity change can be obtained by measuring circuit is proportional to the force changes of the electrical signal output. Piezoresistive pressure sensor for other physical quantity changes of pressure and tension, pressure difference and can change the force (such as level, weight, acceleration, strain and flow, vacuum) measurement and control.
The current MEMS pressure sensors include silicon piezoresistive pressure sensors and silicon capacitive pressure sensors, both of which are micromachined electronic sensors produced on silicon wafers.Silicon piezoresistive pressure sensor is used for high precision semiconductor strain gauge composed of a Wheatstone bridge as the force electricity conversion circuit, power consumption has high measurement accuracy, low and very low cost. A piezoresistive transducer of Wheatstone bridge, such as no pressure change, with zero output and almost no power consumption.MEMS silicon piezoresistive pressure sensor with circular inner force should be fixed around the cup silicon film, using MEMS technology directly to the four high precision semiconductor strain gauge engraved on the surface where the stress is maximum, the Whiston bridge, as the electric power transform circuit for measuring physical quantities, will the pressure directly converted into electricity, the the measurement accuracy can reach 0.01-0.03%FS.Capacitive pressure sensor using MEMS technology to create a cross shaped grille on the wafer on the horizontal grille two root into a set of capacitive pressure sensor, horizontal grille under pressure downward displacement, change the spacing cross grille on two root, also changes the capacitance between the board size, namely delta pressure delta = capacitance.
A sensor made of monocrystalline silicon material using piezoresistive effect and integrated circuit technology. In silicon material force, resistivity change can be obtained by measuring circuit is proportional to the force changes of the electrical signal output. Piezoresistive pressure sensor for other physical quantity changes of pressure and tension, pressure difference and can change the force (such as level, weight, acceleration, strain and flow, vacuum) measurement and control.
