Wafer size6 inches and 8 inches only refers to the diameter of monocrystalline silicon?Recently heard that the polysilicon film also has 6 inches and 8 inches, 6 inches of polysilicon is 125mm*125mm square, which is 8 inches 156mm*156mm 6 inches, but the conversion is 150.2mm, there is nothing like 125mm, if 6 inches is diagonal, the square of the 125mm wafer diagonal length 176.75mm also, not 6 inches?In addition, the 8 inch silicon wafer size also has similar doubts, to solve the.Thanks!
In addition, because the four corners of the monocrystalline silicon wafer is a curved arc so there is such a standard:The chord length (mm) is the arc length x096 inch x09 28.24~31.30x096.5 inch x0910.93~13.54x098 inch x0920.46~23.18The diameter (mm) is the length of the diagonalx096 inch x09150.0 + 0.5x096.5 inch x09165.0 + 0.5x098 inch x09200.0 + 0.5I don't know whether you understand it or not. Welcome to ask me again!
Another 6 inches =152.4mm, 8 inches =203.2mmThe following is a general standard for monocrystalline silicon wafers:6 "x09153mm is more than phi = 158 mm6.2 "x09159 mm = phi = 164 mm6.5 "x09168 mm = phi = 173 mm8 "x09203 mm = phi = 208 mm
Refers to the diagonal length of the silicon waferBut you asked the wrong question, the wafer is divided into monocrystalline silicon and polycrystalline silicon wafer, you say is a square of silicon polysilicon film of silicon wafer, you ask in the four corner is a circular arc shape, so you should also count the length of the diagonal right. If not to shape the polysilicon film solution you can search the Internet search look.
