What devices are used in MEMS devices?
The equipments used include double sided lithography machine, plasma deep silicon etching machine, chemical etching tank, silicon wafer calibration bonder, high temperature furnace, laser corrector and probe test stand.
MEMS uses integrated circuit technology to design, process, manufacture, measure and control micro / nano materials. It is a micro electromechanical system which integrates sensors, actuators, signal processing and control circuits, interface circuits, communications and power supplies.
MEMS device manufacturing equipment: double-sided lithography machine, plasma deep silicon etching machine, chemical corrosion trough, silicon wafer calibration bonding machine, high temperature furnace, laser correction device, probe test stand, etc.
