What is the meaning of microwave gas discharge?
In addition, the microwave discharge from the electrode to form a strong light source (such as sulfur lamps), microwave odor generator, etc., may gradually move towards industrialization.
In microwave plasma, the activity of various particles is stronger than that of radiofrequency plasma, which is more favorable for chemical reaction and material treatment.
Microwave plasma chemical vapor deposition (MPCVD) and plasma etching, microelectronics processing is the main means, the preparation of diamond film and fiber preparation is also used MPCVD method, ultrafine powder preparation, microwave plasma method
Microwave gas discharge, that is, the formation of low-temperature plasma by microwave electromagnetic field, is a microwave power application of a major aspect.
According to the preliminary anthology of research, China's ongoing research on the new field of microwave power research hotspots can be listed below.
