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Question:

Silicon wafer cleaning after the two sides of the upper and lower grille also has a basket of flowers (Bai Yin)

Silicon wafer cleaning after the two sides of the upper and lower grille also has a basket of flowers (Bai Yin)

Answer:

I used to solve this problem for several months before the DOE experiment to solve, so it is very difficult, and there is no relationship with the bubble, and now the cleaning process does not need to bubble
You don't think about it, because it's not a simple process parameter, what is the material, is a comprehensive problem of Chemical Physics
The occurrence of a single crystal is more obvious, other companies have, this would like to find a solution to find a more proficient in the industry to clean up engineers

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