diamond in the solid material is the hardest, reaching HV100GPa, with a thermal conductivity of 20W · cm-l · K-1, to 5 times that of copper, the band gap of 5.47eV, resistivity at room temperature up to 1016Ω · cm,The semiconductor material may be formed. Diamond from ultraviolet to infrared spectrum has high optical transmittance, it is an excellent corrosion-resistant materials. DLC film [1] (DLC) is a kind of new fimlm similar to diamond film. it has higher hardness and good thermal conductivity, low coefficient of friction, excellent electrical insulation properties, high chemical stability sex and infrared light transmission properties. Since 1979 Chabotv and Asienberg produced the first DLC film by Ion beam deposition. characteristics, preparation methods and application scope have been widely explored and studied. DLC products has been widely applied into various fields such as mechanics, electronics ,optics and medicine.
Diamond from ultraviolet to infrared spectrum has high optical transmittance, it is an excellent corrosion-resistant materials. two preparation of diamond films are thermal chemical vapor deposition (TCVD) and plasma chemical vapor deposition (PCVD). The study is to obtain diamond film as a wear-resistant coating, the acoustic diaphragm, optical window, integrated high thermal conductivity of the substrate. it Also studied epitaxial single-crystal diamond film on a silicon wafer to prepare a diamond devices. Diamond-like carbon (DLC) is an amorphous structure, mainly carbon atom sp3 and sp2 hybrid bond. Hydrogen-containing DLC ??is also called α-C: H, wherein a hydrogen content between 20% to 50%. Hydrogen-free DLC film includes hydrogen-free amorphous carbon (α-C) and tetrahedral amorphous carbon (ta-C) film. Α-C film contains some sp3 bonds; ta-C-based film mainly contains sp3 bonds (sp3 & gt; 70%).
Very simple, low pressure or atmospheric pressure chemical vapor deposition (CVD) method synthetic diamond film. But the structure of the DLC film in nature has two crystalline elemental forms: Tetrahedron sp3C-C bonded diamond crystals and Triangle or lamellar sp2C-C bonded graphite crystals. Presence or absence of other forms of amorphous carbon, white carbon (composed spl key) and the like. The reason why many carbon can form crystalline or amorphous carbon, they mainly exsit in the form of three chemical bonds. Sp l, sp2 and sp3. Diamond-like carbon material is carbon. October 2007 an amorphous metastable state structure whose chemical bond is mainly sp2 and sp3. Since the diamond-like carbon material properties is similar to diamond material.soit is called diamond-like carbon. it is generally believed that Sp3 bonds has the higher content. the film is more hard and compact, the higher the resistivity, closer to properties of diamond. the division is based on whether the film contains hydrogen. hydrogenated amorphous carbon films (a-C: H film, typically comprising 50% of hydrogen), hydrogen-free amorphous carbon (a-C film), tetrahedral non-hydrogen carbon (ta-C film). generally the former diamond film is produced by a chemical vapor deposition (CVD). the latter two is produced by physical vapor deposition (PVD).
