The graphite boat loading and loading real real graphite boat is what?
Efficient air through the filter, the damping level pressure, the clean air flow into the vertical unidirectional loading area, so as to ensure the work in the region to achieve the technical requirements of the cleanliness of the operator in a clean environment to the graphite boat on silicon wafer.
The graphite boat used for solar energy industry and real loading: PECVD carrying vehicles, loaded from silicon, preparation of middle and high efficiency filter, ensure that blows air purifying requirements.
Main features:1, can make accurate Shi Mozhou bearing loading vehicle positioning;2 、 made of stainless steel, the structure of the whole machine is firm and reliable;3 、 adopt GK series high efficiency air filter 3;4, PECVD carrier car inside, can tilt 15 degrees or rotate 180 degrees;5 、 purification fan noise is less than 50dB.6, to ensure that the work area to achieve the requirements of cleanliness 100.
